Development of a Roll-to-Roll Ultraviolet Imprint Lithography Equipment for Superhydrophobic Film Fabrication
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    Abstract:

    In this paper, a new roll-to-roll ultraviolet imprint lithography (RtR UV IL) technology was proposed and an equipment for large area super-hydrophobic materials fabrication was developed. By using the RtR micro/nano imprint method and fast UV curing technology, the micro patterns could be transferred to a flexible substrate without complex fabrication process in a clean room. Through this way, large area superhydrophobic film could be fabricated rapidly and efficiently. This paper focuses on discussing the RtR UV IL technology and the related mechanical parts of the equipment which is used for the superhydrophobic film fabrication. After optimizating, a 20 μm×40 μm×17 μm (diameter×pitch×height) micro-structure array was successfully transferred by using modified UVresist. The water contact angle reached up to 150° after fluoride treatment. Finally, we attempted to fabricate T-shaped micro-pillar array by using this equipment to obtain super hydrophobic materials.

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ZOU Yebing, WANG Zhiwei, WU Tianzhun, et al. Development of a Roll-to-Roll Ultraviolet Imprint Lithography Equipment for Superhydrophobic Film Fabrication[J]. Journal of Integration Technology,2017,6(3):59-67

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  • Online: May 22,2017
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